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dc.contributor.author |
Belyaev, A.E. |
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dc.contributor.author |
Boltovets, N.S. |
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dc.contributor.author |
Zhilyaev, Yu.V. |
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dc.contributor.author |
Zhigunov, V.S. |
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dc.contributor.author |
Konakova, R.V. |
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dc.contributor.author |
Panteleev, V.N. |
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dc.contributor.author |
Sachenko, A.V. |
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dc.contributor.author |
Sheremet, V.N. |
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dc.date.accessioned |
2017-05-26T14:02:41Z |
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dc.date.available |
2017-05-26T14:02:41Z |
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dc.date.issued |
2013 |
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dc.identifier.citation |
Effect of microwave radiation on I-V curves and contact resistivity
of ohmic contacts to n-GaN and n-AlN / A.E. Belyaev, N.S. Boltovets, Yu.V. Zhilyaev, V.S. Zhigunov, R.V. Konakova, V.N. Panteleev, A.V. Sachenko, V.N. Sheremet // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2013. — Т. 16, № 3. — С. 289-292. — Бібліогр.: 14 назв. — англ. |
uk_UA |
dc.identifier.issn |
1560-8034 |
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dc.identifier.other |
PACS 73.40.Ns; 73.40.Cg, 85.40.-e |
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dc.identifier.uri |
http://dspace.nbuv.gov.ua/handle/123456789/117734 |
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dc.description.abstract |
We studied ohmic contacts Au-Pd-Ti-Pd-n-AlN and Au-TiB₂-Al-Ti-n-GaN
with contact resistivity ρс = 0.18cm² and 1.6 *10⁻⁴ Ω∙cm² , respectively, and the effect
of microwave treatment on their electrophysical properties. After microwave treatment
for time t up to 1000 s, the contact resistivity dropped by 16% (60%) in the contact to
AlN (GaN). This seems to result from increase of the number of structural defects in the
semiconductor near-contact region caused by relaxation of intrinsic stresses induced by
microwave radiation. |
uk_UA |
dc.description.sponsorship |
This work was supported by the Project III-41-12. |
uk_UA |
dc.language.iso |
en |
uk_UA |
dc.publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
uk_UA |
dc.relation.ispartof |
Semiconductor Physics Quantum Electronics & Optoelectronics |
|
dc.title |
Effect of microwave radiation on I-V curves and contact resistivity of ohmic contacts to n-GaN and n-AlN |
uk_UA |
dc.type |
Article |
uk_UA |
dc.status |
published earlier |
uk_UA |
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