Pershyn, Yu.P.; Devizenko, I.Yu.; Chumak, V.S.; Devizenko, A.Yu.; Kondratenko, V.V.
(Functional Materials, 2018)
X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. ...