Levchenko, I.V.; Tomashyk, V.M.; Stratiychuk, I.B.; Malanych, G.P.; Stanetska, A.S.; Korchovyi, A.A.
(Functional Materials, 2018)
The chemical dissolution of InAs, InSb, GaAs and GaSb crystals in (NH₄)₂Cr₂O₇-HBr-C₆H₈O₇ etching solutions has been investigated. The dissolution rate of the semiconductor materials has been measured as a function of etchant ...