Belyanin, А.F.; Borisov, V.V.; Daghetsyan, S.A.; Evlashin, S.A.; Pilevsky, A.A.; Samorodov, V.A.
(Технология и конструирование в электронной аппаратуре, 2017)
The carbon nanowall (CNW) layers were grown from a gas mixture of hydrogen and methane, activated by a DC glow discharge, on Si substrates (Si/CNW layered structure). The second layer of CNW was grown either on the first ...