Investigation of damaged layer formed at mechanical treatment of sapphire using three-crystal X-ray diffraction method

Abstract

The methods of three-crystal X-ray diffractometry were used for investigating structure perfection in surface-adjacent damaged layer (DL) formed in the process of mechanical and chemical-mechanical treatment of sapphire crystals with the surface orientation {0001} {11-20}. Analysis of the diffraction reflection curves made it possible to establish the structure and character of distortions in the DL. There was established the mean-square disorientation between the fragments, which allowed to characterize the defects structure of the surface-adjacent DL.