Mikhailov, I.F.; Baturin, A.A.; Bugaev, Ye.A.; Mikhailov, A.I.; Borisova, S.S.
(Functional Materials, 2013)
High-stable mass standards prepared as magnetron sputtered super-smooth metal layers deposited on single crystal substrates were attested. The thin film standards were found to meet the requirements to government standards: ...