Koshevoy, K.I.; Volkov, Yu.Ya.; Strel’nitskij, V.E.; Reshetnyak, E.N.
(Вопросы атомной науки и техники, 2019)
Comparative studies of diamond coatings deposition have been carried out in the glow discharge plasma stabilized by a magnetic field in methane-hydrogen medium with using the DC or pulse power supply. It was shown that ...