Konovalov, V.A.; Terpiy, D.N.; Klyahina, N.A.; Kostenko, I.G.; Vasetskaya, L.A.
(Functional Materials, 2008)
The tantalum diboride films have been deposited in various conditions by non-reactive RF magnetron sputtering. The film phase compositions and structures have been determined by X-ray diffraction, secondary ion mass ...