Kuzmichev, A.I.; Melnichenko, M.S.; Shinkarenko, V.G.; Shulaev, V.M.
(Вопросы атомной науки и техники, 2020)
The redistribution of the flow of sputtered material of a target (cathode) between the collector and the target in a plane–parallel electrode system with an anomalous glow discharge is analyzed in the kinetic approximation. ...