Zhuravlov, А.Yu.; Hovanskiy, N.А.; Khizhnyak, D.A.; Shirokov, B.M.; Semenov, N.A.; Shijan, А.V.; Strigunovskiy, S.V.; Yevsiukov, A.I.; Shevtsov, A.B.; Nazarenko, E.A.; Pilipenko, N.N.
(Вопросы атомной науки и техники, 2017)
In the present paper the results of studies on obtaining silicon carbide via chemical gas phase, plasma-chemical and sublimation methods are described. The thermodynamic analysis of chemical reactions of silicon carbide ...