Vasyliev, V.V.; Luchaninov, A.A.; Reshetnyak, E.N.; Strel’nitskij, V.E.; Lorentz, B.; Reichert, S.; Zavaleyev, V.; Walkowicz, J.; Sawczak, M.
(Вопросы атомной науки и техники, 2016)
Cr-Al-N coatings deposited from the vacuum-arc plasma source with rectilinear macroparticle filter were investigated.
Influence of the amplitude of pulsed substrate bias potential in the range of 0…2500 V on the structure ...