Перегляд за автором "Polozov, B.P."

Сортувати за: Порядок: Результатів:

  • About influence of energy of electrons and ions on speed of electron- and ion-stimulated plasmachemical etching of silicon 
    Fedorovich, O.A.; Kruglenko, M.P.; Polozov, B.P. (2010)
    The experimental dependence of the etching rate monosilicon of self-bias voltages on the active electrode at other constant conditions in the discharge is shows. With increasing negative bias potential monosilicon etching ...
  • About peculiarities of self-bias voltage formation in plasma-chemical reactors with controlled magnetic fields 
    Hladkovskiy, V.V.; Fedorovich, O.A.; Polozov, B.P.; Kruglenko, M.P. (Вопросы атомной науки и техники, 2015)
    The peculiarities of self-bias voltage formation in plasma-chemical reactors (PCR) with controlled magnetic fields have been investigated. The dependences of self-bias voltages on the values and configurations of magnetic ...
  • Features of the low energy protons interaction with molibden surface 
    Fedorovich, O.A.; Hladkovskyi, V.V.; Polozov, B.P.; Voitenko, L.M.; Kostin, E.G.; Rokitskyi, А.A.; Oberemok, А.S. (Вопросы атомной науки и техники, 2019)
    The surface of molybdenum changes significantly after the proton irradiation process. The sputtering of the surface leads to a substantial cleaning of oxides. It is also possible to reduce oxides in a hydrogen plasma. The ...
  • Interaction of low-energy protons with aluminum surface 
    Fedorovich, O.A.; Hladkovskyi, V.V.; Polozov, B.P.; Voitenko, L.M.; Kostin, E.G.; Rokitskyi, А.A.; Nedybaliuk, A.F.; Oberemok, А.S.; Burdin, V.V. (Вопросы атомной науки и техники, 2019)
    The article presents the results of researches on the protons interaction with energy of 260 eV with a surface of aluminum foil at the temperature of 300 °C, ion current density of ~ 1.5 mA/cm² with an exposure of 11 hours. ...
  • Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters 
    Fedorovich, O.A.; Kruglenko, M.P.; Lukomskij, D.V.; Marinenko, A.A.; Polozov, B.P. (Вопросы атомной науки и техники, 2007)
    Basic problems arising at the processing of the insulation of p-n transition of photo converters at the conditions of batch production with the use of the industrial plant "Carter" are determined. The way of elimination ...
  • Plasma technologies for manufacturing of micro-strip metal detectors of ionizing radiation 
    Pugatch, V.M.; Perevertaylo, V.L.; Fedorovich, O.A.; Borisenko, A.G.; Kostin, E.G.; Kruglenko, M.P.; Polozov, B.P.; Tarasenko, L.I. (Вопросы атомной науки и техники, 2007)
    The manufacturing of elements of micro-strip metal detectors (MSMD) for ionizing radiation applying plasma-chemistry technologies for etching of multilayer structures is described in details. Results obtained by using ...
  • Technological studies of the plasmachemical reactor with сlosed electron drift 
    Fedorovich, O.A.; Kruglenko, M.P.; Polozov, B.P. (Вопросы атомной науки и техники, 2009)
    Наведено результати технологічних випробувань плазмохімічного реактора (ПХР) з замкнутим дрейфом електронів, розробленого в ІЯД НАНУ. Досліджена залежність швидкості травлення монокремнію від робочого тиску в ПХР. ...
  • The bias voltage and its influence on the etching rate of silicon 
    Fedorovich, О.А.; Hladkovskiy, V.V.; Polozov, B.P.; Kruglenko, М.P. (Вопросы атомной науки и техники, 2015)
    The influence of the bias voltage on the silicon etching rate in the plasma-chemical reactor (PСR) with controlled magnetic fields have been investigated. The dependences of the silicon etching rate on the power, discharge ...
  • The qualitative analysis of the composition of the RF discharge plasma by means of mass-spectrometry 
    Hladkovskiy, V.V.; Polozov, B.P.; Fedorovich, O.A. (Вопросы атомной науки и техники, 2016)
    In this paper presents the research results of mass-spectroscopy of the RF discharge plasma in the controlled magnetic fields. The discharge was conducted in the gases containing halogens and mixtures with the oxygen. ...
  • Рeculiarities of interaction of low-energy protons with tungsten surface 
    Fedorovich, O.A.; Hladkovskyi, V.V.; Polozov, B.P.; Voitenko, L.M.; Kostin, E.G.; Petriakov, V.А.; Rokitskyi, А.A.; Oberemok, А.S.; Burdin, V.V. (Вопросы атомной науки и техники, 2018)
    The results of investigations of the interaction of protons with energy of 250…260 eV with the surface of tungsten foil are presented. Sputtering of tungsten occurs at a rate of ~ 0.5 μm/h at a temperature of 300°C and an ...