Pidkova, V.; Brodnikovska, I.; Duriagina, Z.; Petrovskyy, V.
(Functional Materials, 2014-12-12)
Dielectric layers of Al₂O₃, MgO, AlN and TiO₂ were formed by using ion-plasma sputtering method. Their microstructure and electrophysical properties in the range of 20 - 400°C were investigated. The conductivity mechanism, ...