Gubarev, S.P.; Leonovych, A.V.; Muratov, R.M.; Nezovibat'ko, Y.N.; Opaleva, G.P.; Taran, V.S.; Zolototrubova, M.I.
(Вопросы атомной науки и техники, 2019)
The hardware-software complex for automated control and monitoring of the vacuum system of the coating setup "Bulat-6" is presented. Its use provides the stability of the process of obtaining and maintaining the required ...