Taran, V.S.; Tereshin, V.I.; Timoshenko, A.I.; Chechel’nitskij, O.G.; Kryshtal’, A.P.
(Вопросы атомной науки и техники, 2005)
Some properties of the arc-vapour deposited TiAlN films, obtained both – by condensation of the different and combined titanium and aluminium plasma flows, have been investigated. The different flows was provided by two ...