Vovk, E.A.; Budnikov, A.T.; Nizhankovskyi, S.V.; Kryvonogov, S.I.; Krukhmalev, A.A.; Dobrotvorskaya, M.V.
(Functional Materials, 2013)
Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on ...