Bizukov, A.A.; Borisko, V.N.; Kashaba, А.Е.; Sereda, К.D.; Yunakov, N.N.; Zinov’ev, D.V.
(Вопросы атомной науки и техники, 2003)
In the paper the problem of diamond-like films production by sputtering of a graphite target in the modified plasma accelerator with closed electrons drift is considered. The diamond-like films with thickness 40...400 nm ...