Boyko, E.B.; Komarov, F.F.; Jukowski, P.; Karwat, C.; Kolasik, M.; Kozak, C.
(Физическая инженерия поверхности, 2007)
Recently suggested single-ion-beam setup for ion-beam assisted deposition (IBAD) of layers with
various composition including the sputter target in a form of hollow truncated cone made of the
material to be deposited ...