Horvath, Zs.J.; Orlov, L.K.; Ivina, N.L.; Demidov, E.S.; Vdovin, V.I.; Adam, M.; Szabo, I.; Dozsa, L.; Pashaev, E.M.; Ivanov, Yu.M.; Yakunin, S.N.
(Functional Materials, 2004)
Defects in Si/SiGe heterostructures and electrical behavior thereof have been studied. Misfit dislocations were observed in the epitaxial layers using cross-sectional transmission electron microscopy. These defects cause ...