Chutov, Yu.I.; Goedheer, W.J.; Kravchenko, O.Yu.; Levada, G.I.; Lisitchenko, T.E.; Romanenko, R.O.
(Вопросы атомной науки и техники, 2005)
Kinetic computer simulations of the low pressure RF discharge in argon with cylindrical and spherical dust particles are carried out using PIC/MCC method. The Monte Carlo technique is used to describe electron and ion ...