Gasilin, V.V.; Kunchenko, V.V.; Nezovybat’ko, Yu.N.; Taran, A.V.; Taran, V.S.; Tereshin, V.I.; Shvets, O.M.
(Вопросы атомной науки и техники, 2003)
In the presentation we investigate the possibilities to deposit metallic and dielectric films on metal and dielectric materials by means of vacuum technology with application of high frequency (RF) electric fields. As a ...