Evtukh, A.A.; Kaganovich, E.B.; Litovchenko, V.G.; Litvin, Yu.M.; Fedin, D.V.; Manoilov, E.G.; Svechnikov, S.V.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2000)
The new preparation method of silicon tips with nanocomposite structure, namely laser modification of silicon is developed. The laser direct-write process has been applied, one by one (single) laser pulses formed the single ...