Romaniuk, S.P.; Bilinska, M.S.; Taran, A.V.; Klochko, O.Yu.; Nowakowska-Langier, K.; Marchenko, A.K.; Deryabkina, E.S.; Nikolaychuk, G.P.
(Problems of Atomic Science and Technology, 2022)
Nanostructured ZrN coatings were deposited by the vacuum arc method with partial separation of the plasma flow from macroparticles using a curvilinear magnetic filter. With the proposed deposition parameters, a ZrN coating ...