Zhuravel, I.O.; Bugayev, Ye.A.; Konotopsky, L.E.; Zubarev, E.M.; Sevryukova, V.A.; Kondratenko, V.V.
(Физическая инженерия поверхности, 2012)
Amorphous C/Si multilayers were prepared by DC magnetron sputtering technique and investigated
by transmission electron microscopy and low-angle x-ray diffraction methods after annealing at 650
and 950 °C. The amorphous ...