Chunadra, А.G.; Sereda, К.N.; Tarasov, I.K.; Bizukov, А.А.; Girka, A.I.
(Вопросы атомной науки и техники, 2017)
The results of researches of the combined stationary-pulsed operating mode of longitudinal planar magnetron sputtering system (MSS) with a magnetically isolated anode and with the additional pulsed high-current, high-voltage ...