Myroniuk, D.V.; Ievtushenko, A.I.; Lashkarev, G.V.; Maslyuk, V.T.; Timofeeva, I.I.; Baturin, V.A.; Karpenko, O.Yu.; Kuznetsov, V.M.; Dranchuk, M.V.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2015)
Transparent conductive oxide thin films of Al-doped ZnO grown by rf magnetron sputtering were irradiated with high energy electrons with the energy 12.6 MeV and fluence 5·10¹⁴ e/cm². The films were produced using different ...